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Chemical Mechanical Planarization System

Prior Information Notice

General Information
Country:   United States
Notice/Contract Number:   fbo:amd-10-ss63
Publication Date:   Mar 28, 2010
Deadline:   Mar 12, 2010
Funding Agency:   Department of Commerce
Buyer:   National Institute of Standards and Technology (NIST)
Original Language:   English

Contact Information
Address:   United States

Goods, Works and Services

 

Original Text

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This is a SOURCES SOUGHT NOTICE for market research purposes. THIS IS NOT A REQUEST FOR PROPOSALS. The National Institute of Standards & Technology (NIST) seeks information on commercial vendors capable of providing a chemical mechanical planarization (CMP) system in support of several on-going scientific and technical research projects in the Center for Nanoscale Science and Technology (CNST) NanoFab laboratory. The system will be sited and used in a multi-user facility. After the results of this market research are obtained and analyzed and specifications are developed for a CMP system that can meet NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small business manufacturers are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside. The system will need to meet the following requirements: 1. MATERIALS to be planarized: silicon wafers with buried metal features, silicon oxide wafers, silicon nitride layers 2. SUBSTRATE SIZE: System should be capable of handling substrates from 75mm to 200mm in diameter with minimal retooling necessary 3. BASIC SPECIFICATIONS 3.1 Single wafer capability 3.2 Semi automatic operation 3.3 Manual loading 3.4 Variable speed spindle 3.5 Variable speed table 3.6 Enclosure with safety interlocks and viewing window 3.7 Planarization recipes provided for standard materials 3.8 Process recipes developed on this R&D tool need to be directly transferrable to high volume production tool 3.9 Planarization uniformity across wafer <5% [(max-min)/2mean] with a 3mm edge exclusion 4. PREFERRABLE SPECIFICATIONS 4.1 Method to apply controlled down-pressure to wafer carrier 4.2 Method to reduce edge exclusion to a minimum 4.3 Method to keep pad wet in order to extend pad life 4.4 Programmable pad conditioning to improve uniformity and help ensure repeatable removal rates 5. OPTIONS 4.1 Temperature control of table 4.2 On-board vacuum generator 4.3 Endpoint detection capability 4.4 Planarization of small irregularly shaped substrates 6. DEMONSTRATION OF CAPABILITY The prospective vendors shall demonstrate planarization capability on samples containing various features having sizes down to the tens of nm furnished by NIST 7. TECHNICAL SUPPORT is required including installation, as well as process development 8. OPERATING SOFTWARE: System operating software shall facilitate ease of instrument use since installed in a multi-user facility. Operation through touch screen or mouse control 9. DELIVERY and INSTALLATION: System shall be delivered and installed no later than 6 months ARO 10. Any systems proposed shall have a documented history of at least three prior systems installed and operating in multi-user type facilities. NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company�s size classification in any response to this notice. Companies that manufacture these types of systems are requested to email a detailed report describing their abilities to carol.wood@nist.gov no later than the response date for this sources sought notice. The report should include achievable specifications, demonstrate prior systems that are currently installed and operating in multi-user type facilities, and any other information relevant to your product or capabilities. Also, the following information is requested to be provided as part of the response to this sources sought notice: 1. Name and business size of the company that manufactures the system for which specifications are provided; 2. Name of company(ies) that are authorized to sell the systems, their addresses, and a point of contact for the company (name, phone number, fax number and email address); 3. Indication of number of days, after receipt of order that is typical for delivery of such systems; 4. Indication of whether each system (including installation) for which specifications are sent to carol.wood@nist.gov are currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s); 5. Any other relevant information that is not listed above which the Government should consider in finalizing its market research. All documentation must be sent to Carol A. Wood, Contract Specialist, at the National Institute of Standards and Technology, Acquisition Management Division, 100 Bureau Drive, Mail Stop 1640, Gaithersburg, MD 20899-1640. E-mail address: CAROL.WOOD@NIST.GOV. Submission must be received not later than 3:00 PM local time on March 12, 2010.
Set-aside code: N/A
Place of performance:
 NIST 100 Bureau Drive Gaithersburg, MD
 20899
 US
Contact: Carol A. Wood, Phone 301-975-8172, Fax 301-975-6273, Email carol.wood@nist.gov - Carol A. Wood, Phone 301-975-8172, Fax 301-975-6273, Email carol.wood@nist.gov

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Updated on 2010/02/21
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