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SE-Kista: laboratory, optical and precision equipments (excl. glasses)

Contract Award

General Information
Country:   Sweden
City/Locality:   KISTA
Notice/Contract Number:   eu:322358-2009
Publication Date:   Nov 21, 2009
Buyer:   KUNGLIGA TEKNISKA HÖGSKOLAN, KTH
Original Language:   English

Contact Information
Address:   KUNGLIGA TEKNISKA HOEGSKOLAN, KTH
KISTA, Södermanlands län
Sweden
Email:   Click here

Goods, Works and Services

 

Summary

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Notice Type: 2180 - Contract award
Regulation of Procurement: European Communities, with participation by GPA countries
EU Official Journal Publication: 225/2009, #322358-2009
Referenced Document Number: 26949-2009
Contract Nature: Supply contract
Procedure Type: Contract awards
Type of Bid Required: Not applicable
Awarding Criteria: Not defined
Successful Bidder: NAME AND ADDRESS OF ECONOMIC OPERATOR TO WHOM THE CONTRACT HAS BEEN
AWARDED: Beneq OY, Ensimmäinen Savu, FIN-01510 Vantaa.

Original Text

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CONTRACT AWARD NOTICE
Supplies
SECTION I: CONTRACTING AUTHORITY
I.1) NAME, ADDRESSES AND CONTACT POINT(S): Kungliga Tekniska Högskolan,
KTH, Electrum 229, Contact: Skolan för Informations och
Kommunikationsteknologi (ICT)/Skolan för Informations och
Kommunikationsteknologi (ICT), Attn: Thomas Tonndorf, S-164 40 Kista. Tel.
+46 87904302. E-mail: tht@kth.se.
I.2) TYPE OF THE CONTRACTING AUTHORITY AND MAIN ACTIVITY OR ACTIVITIES:
Other: Universitet.
Other: Forskning och utbildning.
The contracting authority is purchasing on behalf of other contracting
authorities: no.
SECTION II: OBJECT OF THE CONTRACT
II.1) DESCRIPTION
II.1.1) Title attributed to the contract by the contracting authority:
Atomic Layer Deposition (ALD) system.
II.1.2) Type of contract and location of works, place of delivery or of
performance: Supplies.
Purchase.
Main place of delivery: Kista.
NUTS code SE122.
II.1.4) Short description of the contract or purchase(s): This
procurements concerns a universal, automated turn-key Atomic Layer
Deposition (ALD) system for conformal deposition of thin layers of
advanced oxides, nitrides and metals on planar Si wafers. The tool must be
equipped with thermal ALD, and at a minimum two liquid sources, four gases
lines, and two hot sources at one time.
Examples of materials, relevant for our applications are: SiO2, MgO, HfO2,
HfSiO2, HfLaO2, Al2O3, TiO2, SiN, AlN, TiN, and Pt. The layers are acting
as a functional part of the devices or are investigated with respect to
their physical properties, and could be used as, e.g.; high-k dielectrics
with metal gates in nanoelectronics, oxide/ nitride liners and etch stop
layers, conformally deposited oxides for MEMS, passivation oxides for SiC
and magnetic oxide layers.
The tool must be flexible, both in a short term (day-to-day) and in a long
term perspective, and it will be used over a broad field of research
programs by graduate students and research engineers at KTH and by
collaboration partners, and also within various industrial development
projects, as well as for prototyping and small scale production.
II.1.5) Common procurement vocabulary (CPV): 38000000, 38400000,
38432000.
II.1.6) Contract covered by the Government Procurement Agreement (GPA):
Yes.
SECTION IV: PROCEDURE
IV.1) TYPE OF PROCEDURE
IV.1.1) Type of procedure: Open.
IV.2) AWARD CRITERIA
IV.2.2) An electronic auction was used: No.
IV.3) ADMINISTRATIVE INFORMATION
IV.3.1) File reference number attributed by the Contracting Authority:
1-2008-0797.
IV.3.2) Previous publication(s) concerning the same contract: Contract
notice
Notice number in OJ: 2009/S 19-026949 of 29.1.2009.
SECTION V: AWARD OF CONTRACT
CONTRACT NO: 1
TITLE: Beneq OY.
V.1) DATE OF CONTRACT AWARD: 17.9.2009.
V.2) NUMBER OF OFFERS RECEIVED: 3.
V.3) NAME AND ADDRESS OF ECONOMIC OPERATOR TO WHOM THE CONTRACT HAS BEEN
AWARDED: Beneq OY, Ensimmäinen Savu, FIN-01510 Vantaa.
SECTION VI: COMPLEMENTARY INFORMATION
VI.1) CONTRACT RELATED TO A PROJECT AND/OR PROGRAMME FINANCED BY
COMMUNITY FUNDS: No.
VI.2) ADDITIONAL INFORMATION: ID: 11731-101764-2009.
VI.4) DATE OF DISPATCH OF THIS NOTICE: 19.11.2009.
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